



Model |
IMS-320D | IMS-320U | |
|---|---|---|---|
| Joystick type | Inverted | Upright | |
| Control method | Dual-model of speed/position,one joystick for movement control inX-Y-Z axis | ||
| Dimensions (W×H×D) |
202mm×270mm×225mm | 200mm×275mm×130mm | |
| Step size (computationalresolution) |
<20nm | ||
| Maximum speed | 0~10,000μm/s | ||
| Travelling distance | 20mm | ||
| Direction of rotation | 15°-45° | ||